4/21/2010	8:08:37 AM	Bypass valve closed
4/21/2010	8:08:37 AM	Main Vac valve closed
4/21/2010	8:08:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:08:54 AM	Recipe started at 8:08 AM
4/21/2010	8:08:54 AM	H2 valve closed
4/21/2010	8:08:54 AM	BCl3 valve closed
4/21/2010	8:08:54 AM	PH3 valve closed
4/21/2010	8:08:54 AM	SiCl4 pre valve closed
4/21/2010	8:08:54 AM	SiCl4 post valve closed
4/21/2010	8:08:54 AM	Main Vac valve closed
4/21/2010	8:08:54 AM	Bypass valve closed
4/21/2010	8:08:54 AM	Bubbler valve closed
4/21/2010	8:08:54 AM	Helium valve opened
4/21/2010	8:08:54 AM	Helium MFC set to  500.000000
4/21/2010	8:08:54 AM	H2 MFC set to  0.000000
4/21/2010	8:08:54 AM	BCl3 MFC set to  0.000000
4/21/2010	8:08:54 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:08:54 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:08:54 AM	Tube furnace set to 0
4/21/2010	8:10:12 AM	Helium valve closed
4/21/2010	8:10:12 AM	H2 valve closed
4/21/2010	8:10:12 AM	BCl3 valve closed
4/21/2010	8:10:12 AM	PH3 valve closed
4/21/2010	8:10:12 AM	SiCl4 pre valve closed
4/21/2010	8:10:12 AM	SiCl4 post valve closed
4/21/2010	8:10:12 AM	Main Vac valve closed
4/21/2010	8:10:12 AM	Bypass valve closed
4/21/2010	8:10:12 AM	Bubbler valve closed
4/21/2010	8:10:12 AM	Helium MFC set to  0.000000
4/21/2010	8:10:12 AM	H2 MFC set to  0.000000
4/21/2010	8:10:12 AM	BCl3 MFC set to  0.000000
4/21/2010	8:10:12 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:10:12 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:10:12 AM	Tube furnace set to 0
4/21/2010	8:10:12 AM	Run finished at 8:10 AM
4/21/2010	8:10:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:10:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	8:10:23 AM	Recipe started at 8:10 AM
4/21/2010	8:10:23 AM	Helium valve closed
4/21/2010	8:10:23 AM	H2 valve closed
4/21/2010	8:10:23 AM	BCl3 valve closed
4/21/2010	8:10:23 AM	PH3 valve closed
4/21/2010	8:10:23 AM	SiCl4 pre valve closed
4/21/2010	8:10:23 AM	SiCl4 post valve closed
4/21/2010	8:10:23 AM	Main Vac valve closed
4/21/2010	8:10:23 AM	Bubbler valve closed
4/21/2010	8:10:23 AM	Bypass valve opened
4/21/2010	8:10:23 AM	Helium MFC set to  0.000000
4/21/2010	8:10:23 AM	H2 MFC set to  0.000000
4/21/2010	8:10:23 AM	BCl3 MFC set to  0.000000
4/21/2010	8:10:23 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:10:23 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:10:24 AM	Tube furnace set to 0
4/21/2010	8:10:52 AM	Helium valve closed
4/21/2010	8:10:52 AM	H2 valve closed
4/21/2010	8:10:52 AM	BCl3 valve closed
4/21/2010	8:10:52 AM	PH3 valve closed
4/21/2010	8:10:52 AM	SiCl4 pre valve closed
4/21/2010	8:10:52 AM	SiCl4 post valve closed
4/21/2010	8:10:52 AM	Bubbler valve closed
4/21/2010	8:10:52 AM	Main Vac valve opened
4/21/2010	8:10:52 AM	Bypass valve opened
4/21/2010	8:10:52 AM	Helium MFC set to  0.000000
4/21/2010	8:10:52 AM	H2 MFC set to  0.000000
4/21/2010	8:10:52 AM	BCl3 MFC set to  0.000000
4/21/2010	8:10:52 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:10:52 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:10:52 AM	Tube furnace set to 0
4/21/2010	8:10:53 AM	Run finished at 8:10 AM
4/21/2010	8:10:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	8:11:46 AM	Bypass valve closed
4/21/2010	8:11:46 AM	Main Vac valve closed
4/21/2010	8:12:03 AM	Main Vac valve opened
4/21/2010	8:12:04 AM	Bypass valve opened
4/21/2010	8:13:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:13:22 AM	Recipe started at 8:13 AM
4/21/2010	8:13:22 AM	H2 valve closed
4/21/2010	8:13:22 AM	BCl3 valve closed
4/21/2010	8:13:22 AM	PH3 valve closed
4/21/2010	8:13:22 AM	SiCl4 pre valve closed
4/21/2010	8:13:22 AM	SiCl4 post valve closed
4/21/2010	8:13:22 AM	Main Vac valve closed
4/21/2010	8:13:22 AM	Bypass valve closed
4/21/2010	8:13:22 AM	Bubbler valve closed
4/21/2010	8:13:22 AM	Helium valve opened
4/21/2010	8:13:22 AM	Helium MFC set to  500.000000
4/21/2010	8:13:22 AM	H2 MFC set to  0.000000
4/21/2010	8:13:22 AM	BCl3 MFC set to  0.000000
4/21/2010	8:13:22 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:13:22 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:13:22 AM	Tube furnace set to 0
4/21/2010	8:14:41 AM	Helium valve closed
4/21/2010	8:14:41 AM	H2 valve closed
4/21/2010	8:14:41 AM	BCl3 valve closed
4/21/2010	8:14:41 AM	PH3 valve closed
4/21/2010	8:14:41 AM	SiCl4 pre valve closed
4/21/2010	8:14:41 AM	SiCl4 post valve closed
4/21/2010	8:14:41 AM	Main Vac valve closed
4/21/2010	8:14:41 AM	Bypass valve closed
4/21/2010	8:14:41 AM	Bubbler valve closed
4/21/2010	8:14:41 AM	Helium MFC set to  0.000000
4/21/2010	8:14:41 AM	H2 MFC set to  0.000000
4/21/2010	8:14:41 AM	BCl3 MFC set to  0.000000
4/21/2010	8:14:41 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:14:41 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:14:41 AM	Tube furnace set to 0
4/21/2010	8:14:41 AM	Run finished at 8:14 AM
4/21/2010	8:14:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:16:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	8:16:11 AM	Recipe started at 8:16 AM
4/21/2010	8:16:11 AM	Helium valve closed
4/21/2010	8:16:11 AM	H2 valve closed
4/21/2010	8:16:11 AM	BCl3 valve closed
4/21/2010	8:16:11 AM	PH3 valve closed
4/21/2010	8:16:11 AM	SiCl4 pre valve closed
4/21/2010	8:16:11 AM	SiCl4 post valve closed
4/21/2010	8:16:11 AM	Main Vac valve closed
4/21/2010	8:16:11 AM	Bubbler valve closed
4/21/2010	8:16:11 AM	Bypass valve opened
4/21/2010	8:16:11 AM	Helium MFC set to  0.000000
4/21/2010	8:16:11 AM	H2 MFC set to  0.000000
4/21/2010	8:16:11 AM	BCl3 MFC set to  0.000000
4/21/2010	8:16:11 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:16:11 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:16:12 AM	Tube furnace set to 0
4/21/2010	8:16:43 AM	Helium valve closed
4/21/2010	8:16:43 AM	H2 valve closed
4/21/2010	8:16:43 AM	BCl3 valve closed
4/21/2010	8:16:43 AM	PH3 valve closed
4/21/2010	8:16:43 AM	SiCl4 pre valve closed
4/21/2010	8:16:43 AM	SiCl4 post valve closed
4/21/2010	8:16:43 AM	Bubbler valve closed
4/21/2010	8:16:43 AM	Main Vac valve opened
4/21/2010	8:16:43 AM	Bypass valve opened
4/21/2010	8:16:43 AM	Helium MFC set to  0.000000
4/21/2010	8:16:43 AM	H2 MFC set to  0.000000
4/21/2010	8:16:43 AM	BCl3 MFC set to  0.000000
4/21/2010	8:16:43 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:16:43 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:16:43 AM	Tube furnace set to 0
4/21/2010	8:16:44 AM	Run finished at 8:16 AM
4/21/2010	8:16:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	8:17:14 AM	SiCl4 post valve opened
4/21/2010	8:17:31 AM	SiCl4 post valve closed
4/21/2010	8:17:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:17:37 AM	Recipe started at 8:17 AM
4/21/2010	8:17:37 AM	H2 valve closed
4/21/2010	8:17:37 AM	BCl3 valve closed
4/21/2010	8:17:37 AM	PH3 valve closed
4/21/2010	8:17:37 AM	SiCl4 pre valve closed
4/21/2010	8:17:37 AM	SiCl4 post valve closed
4/21/2010	8:17:37 AM	Main Vac valve closed
4/21/2010	8:17:37 AM	Bypass valve closed
4/21/2010	8:17:37 AM	Bubbler valve closed
4/21/2010	8:17:37 AM	Helium valve opened
4/21/2010	8:17:37 AM	Helium MFC set to  500.000000
4/21/2010	8:17:37 AM	H2 MFC set to  0.000000
4/21/2010	8:17:37 AM	BCl3 MFC set to  0.000000
4/21/2010	8:17:37 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:17:37 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:17:37 AM	Tube furnace set to 0
4/21/2010	8:18:58 AM	Helium valve closed
4/21/2010	8:18:58 AM	H2 valve closed
4/21/2010	8:18:58 AM	BCl3 valve closed
4/21/2010	8:18:58 AM	PH3 valve closed
4/21/2010	8:18:58 AM	SiCl4 pre valve closed
4/21/2010	8:18:58 AM	SiCl4 post valve closed
4/21/2010	8:18:58 AM	Main Vac valve closed
4/21/2010	8:18:58 AM	Bypass valve closed
4/21/2010	8:18:58 AM	Bubbler valve closed
4/21/2010	8:18:58 AM	Helium MFC set to  0.000000
4/21/2010	8:18:58 AM	H2 MFC set to  0.000000
4/21/2010	8:18:58 AM	BCl3 MFC set to  0.000000
4/21/2010	8:18:58 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:18:58 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:18:58 AM	Tube furnace set to 0
4/21/2010	8:18:58 AM	Run finished at 8:18 AM
4/21/2010	8:18:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:19:03 AM	SiCl4 post valve opened
4/21/2010	8:19:05 AM	SiCl4 post valve closed
4/21/2010	8:25:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	8:25:11 AM	Recipe started at 8:25 AM
4/21/2010	8:25:11 AM	Helium valve closed
4/21/2010	8:25:11 AM	H2 valve closed
4/21/2010	8:25:11 AM	BCl3 valve closed
4/21/2010	8:25:11 AM	PH3 valve closed
4/21/2010	8:25:11 AM	SiCl4 pre valve closed
4/21/2010	8:25:11 AM	SiCl4 post valve closed
4/21/2010	8:25:11 AM	Main Vac valve closed
4/21/2010	8:25:11 AM	Bubbler valve closed
4/21/2010	8:25:11 AM	Bypass valve opened
4/21/2010	8:25:11 AM	Helium MFC set to  0.000000
4/21/2010	8:25:11 AM	H2 MFC set to  0.000000
4/21/2010	8:25:11 AM	BCl3 MFC set to  0.000000
4/21/2010	8:25:11 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:25:11 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:25:11 AM	Tube furnace set to 0
4/21/2010	8:25:40 AM	Helium valve closed
4/21/2010	8:25:40 AM	H2 valve closed
4/21/2010	8:25:40 AM	BCl3 valve closed
4/21/2010	8:25:40 AM	PH3 valve closed
4/21/2010	8:25:40 AM	SiCl4 pre valve closed
4/21/2010	8:25:40 AM	SiCl4 post valve closed
4/21/2010	8:25:40 AM	Bubbler valve closed
4/21/2010	8:25:40 AM	Main Vac valve opened
4/21/2010	8:25:40 AM	Bypass valve opened
4/21/2010	8:25:40 AM	Helium MFC set to  0.000000
4/21/2010	8:25:40 AM	H2 MFC set to  0.000000
4/21/2010	8:25:40 AM	BCl3 MFC set to  0.000000
4/21/2010	8:25:40 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:25:40 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:25:41 AM	Tube furnace set to 0
4/21/2010	8:25:41 AM	Run finished at 8:25 AM
4/21/2010	8:25:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	8:26:24 AM	Bypass valve closed
4/21/2010	8:26:25 AM	Main Vac valve closed
4/21/2010	8:26:38 AM	Main Vac valve opened
4/21/2010	8:28:07 AM	Main Vac valve closed
4/21/2010	8:28:25 AM	Main Vac valve opened
4/21/2010	8:56:37 AM	Main Vac valve closed
4/21/2010	8:57:14 AM	Main Vac valve opened
4/21/2010	8:57:25 AM	Main Vac valve closed
4/21/2010	8:57:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	8:57:43 AM	Recipe started at 8:57 AM
4/21/2010	8:57:43 AM	H2 valve closed
4/21/2010	8:57:43 AM	BCl3 valve closed
4/21/2010	8:57:43 AM	PH3 valve closed
4/21/2010	8:57:43 AM	SiCl4 pre valve closed
4/21/2010	8:57:43 AM	SiCl4 post valve closed
4/21/2010	8:57:43 AM	Main Vac valve closed
4/21/2010	8:57:43 AM	Bypass valve closed
4/21/2010	8:57:43 AM	Bubbler valve closed
4/21/2010	8:57:43 AM	Helium valve opened
4/21/2010	8:57:43 AM	Helium MFC set to  500.000000
4/21/2010	8:57:43 AM	H2 MFC set to  0.000000
4/21/2010	8:57:43 AM	BCl3 MFC set to  0.000000
4/21/2010	8:57:43 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:57:43 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:57:43 AM	Tube furnace set to 0
4/21/2010	8:59:04 AM	Helium valve closed
4/21/2010	8:59:04 AM	H2 valve closed
4/21/2010	8:59:04 AM	BCl3 valve closed
4/21/2010	8:59:04 AM	PH3 valve closed
4/21/2010	8:59:04 AM	SiCl4 pre valve closed
4/21/2010	8:59:04 AM	SiCl4 post valve closed
4/21/2010	8:59:04 AM	Main Vac valve closed
4/21/2010	8:59:04 AM	Bypass valve closed
4/21/2010	8:59:04 AM	Bubbler valve closed
4/21/2010	8:59:04 AM	Helium MFC set to  0.000000
4/21/2010	8:59:04 AM	H2 MFC set to  0.000000
4/21/2010	8:59:04 AM	BCl3 MFC set to  0.000000
4/21/2010	8:59:04 AM	SiCl4 MFC set to  0.000000
4/21/2010	8:59:04 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	8:59:04 AM	Tube furnace set to 0
4/21/2010	8:59:04 AM	Run finished at 8:59 AM
4/21/2010	8:59:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:03:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:03:24 AM	Recipe started at 9:03 AM
4/21/2010	9:03:24 AM	Helium valve closed
4/21/2010	9:03:24 AM	H2 valve closed
4/21/2010	9:03:24 AM	BCl3 valve closed
4/21/2010	9:03:24 AM	PH3 valve closed
4/21/2010	9:03:24 AM	SiCl4 pre valve closed
4/21/2010	9:03:24 AM	SiCl4 post valve closed
4/21/2010	9:03:24 AM	Main Vac valve closed
4/21/2010	9:03:24 AM	Bubbler valve closed
4/21/2010	9:03:24 AM	Bypass valve opened
4/21/2010	9:03:24 AM	Helium MFC set to  0.000000
4/21/2010	9:03:24 AM	H2 MFC set to  0.000000
4/21/2010	9:03:24 AM	BCl3 MFC set to  0.000000
4/21/2010	9:03:24 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:03:24 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:03:24 AM	Tube furnace set to 0
4/21/2010	9:03:53 AM	Helium valve closed
4/21/2010	9:03:53 AM	H2 valve closed
4/21/2010	9:03:53 AM	BCl3 valve closed
4/21/2010	9:03:53 AM	PH3 valve closed
4/21/2010	9:03:53 AM	SiCl4 pre valve closed
4/21/2010	9:03:53 AM	SiCl4 post valve closed
4/21/2010	9:03:53 AM	Bubbler valve closed
4/21/2010	9:03:53 AM	Main Vac valve opened
4/21/2010	9:03:53 AM	Bypass valve opened
4/21/2010	9:03:53 AM	Helium MFC set to  0.000000
4/21/2010	9:03:53 AM	H2 MFC set to  0.000000
4/21/2010	9:03:53 AM	BCl3 MFC set to  0.000000
4/21/2010	9:03:53 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:03:53 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:03:53 AM	Tube furnace set to 0
4/21/2010	9:03:54 AM	Run finished at 9:03 AM
4/21/2010	9:03:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:07:09 AM	Bypass valve closed
4/21/2010	9:07:10 AM	Main Vac valve closed
4/21/2010	9:07:24 AM	Main Vac valve opened
4/21/2010	9:09:33 AM	H2 valve opened
4/21/2010	9:09:34 AM	H2 valve closed
4/21/2010	9:09:47 AM	BCl3 valve opened
4/21/2010	9:09:47 AM	BCl3 valve closed
4/21/2010	9:10:20 AM	Main Vac valve closed
4/21/2010	9:10:25 AM	Main Vac valve opened
4/21/2010	9:13:14 AM	Main Vac valve closed
4/21/2010	9:13:50 AM	Main Vac valve opened
4/21/2010	9:13:51 AM	Bypass valve opened
4/21/2010	9:15:31 AM	Bypass valve closed
4/21/2010	9:15:32 AM	Main Vac valve closed
4/21/2010	9:15:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:15:49 AM	Recipe started at 9:15 AM
4/21/2010	9:15:49 AM	H2 valve closed
4/21/2010	9:15:49 AM	BCl3 valve closed
4/21/2010	9:15:49 AM	PH3 valve closed
4/21/2010	9:15:49 AM	SiCl4 pre valve closed
4/21/2010	9:15:49 AM	SiCl4 post valve closed
4/21/2010	9:15:49 AM	Main Vac valve closed
4/21/2010	9:15:49 AM	Bypass valve closed
4/21/2010	9:15:49 AM	Bubbler valve closed
4/21/2010	9:15:49 AM	Helium valve opened
4/21/2010	9:15:49 AM	Helium MFC set to  500.000000
4/21/2010	9:15:49 AM	H2 MFC set to  0.000000
4/21/2010	9:15:49 AM	BCl3 MFC set to  0.000000
4/21/2010	9:15:49 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:15:49 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:15:49 AM	Tube furnace set to 0
4/21/2010	9:17:09 AM	Helium valve closed
4/21/2010	9:17:09 AM	H2 valve closed
4/21/2010	9:17:09 AM	BCl3 valve closed
4/21/2010	9:17:09 AM	PH3 valve closed
4/21/2010	9:17:09 AM	SiCl4 pre valve closed
4/21/2010	9:17:09 AM	SiCl4 post valve closed
4/21/2010	9:17:09 AM	Main Vac valve closed
4/21/2010	9:17:09 AM	Bypass valve closed
4/21/2010	9:17:09 AM	Bubbler valve closed
4/21/2010	9:17:09 AM	Helium MFC set to  0.000000
4/21/2010	9:17:09 AM	H2 MFC set to  0.000000
4/21/2010	9:17:09 AM	BCl3 MFC set to  0.000000
4/21/2010	9:17:09 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:17:09 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:17:09 AM	Tube furnace set to 0
4/21/2010	9:17:10 AM	Run finished at 9:17 AM
4/21/2010	9:17:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:17:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:17:17 AM	Recipe started at 9:17 AM
4/21/2010	9:17:17 AM	Helium valve closed
4/21/2010	9:17:17 AM	H2 valve closed
4/21/2010	9:17:17 AM	BCl3 valve closed
4/21/2010	9:17:17 AM	PH3 valve closed
4/21/2010	9:17:17 AM	SiCl4 pre valve closed
4/21/2010	9:17:17 AM	SiCl4 post valve closed
4/21/2010	9:17:17 AM	Main Vac valve closed
4/21/2010	9:17:17 AM	Bubbler valve closed
4/21/2010	9:17:17 AM	Bypass valve opened
4/21/2010	9:17:17 AM	Helium MFC set to  0.000000
4/21/2010	9:17:17 AM	H2 MFC set to  0.000000
4/21/2010	9:17:17 AM	BCl3 MFC set to  0.000000
4/21/2010	9:17:17 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:17:17 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:17:17 AM	Tube furnace set to 0
4/21/2010	9:17:46 AM	Helium valve closed
4/21/2010	9:17:46 AM	H2 valve closed
4/21/2010	9:17:46 AM	BCl3 valve closed
4/21/2010	9:17:46 AM	PH3 valve closed
4/21/2010	9:17:46 AM	SiCl4 pre valve closed
4/21/2010	9:17:46 AM	SiCl4 post valve closed
4/21/2010	9:17:46 AM	Bubbler valve closed
4/21/2010	9:17:46 AM	Main Vac valve opened
4/21/2010	9:17:46 AM	Bypass valve opened
4/21/2010	9:17:46 AM	Helium MFC set to  0.000000
4/21/2010	9:17:46 AM	H2 MFC set to  0.000000
4/21/2010	9:17:46 AM	BCl3 MFC set to  0.000000
4/21/2010	9:17:46 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:17:46 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:17:47 AM	Tube furnace set to 0
4/21/2010	9:17:47 AM	Run finished at 9:17 AM
4/21/2010	9:17:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:18:44 AM	Bypass valve closed
4/21/2010	9:18:45 AM	Main Vac valve closed
4/21/2010	9:18:55 AM	Main Vac valve opened
4/21/2010	9:18:55 AM	Bypass valve opened
4/21/2010	9:24:29 AM	Bypass valve closed
4/21/2010	9:24:30 AM	Main Vac valve closed
4/21/2010	9:25:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:25:08 AM	Recipe started at 9:25 AM
4/21/2010	9:25:08 AM	H2 valve closed
4/21/2010	9:25:08 AM	BCl3 valve closed
4/21/2010	9:25:08 AM	PH3 valve closed
4/21/2010	9:25:08 AM	SiCl4 pre valve closed
4/21/2010	9:25:08 AM	SiCl4 post valve closed
4/21/2010	9:25:08 AM	Main Vac valve closed
4/21/2010	9:25:08 AM	Bypass valve closed
4/21/2010	9:25:08 AM	Bubbler valve closed
4/21/2010	9:25:08 AM	Helium valve opened
4/21/2010	9:25:08 AM	Helium MFC set to  500.000000
4/21/2010	9:25:08 AM	H2 MFC set to  0.000000
4/21/2010	9:25:08 AM	BCl3 MFC set to  0.000000
4/21/2010	9:25:08 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:25:08 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:25:09 AM	Tube furnace set to 0
4/21/2010	9:26:29 AM	Helium valve closed
4/21/2010	9:26:29 AM	H2 valve closed
4/21/2010	9:26:29 AM	BCl3 valve closed
4/21/2010	9:26:29 AM	PH3 valve closed
4/21/2010	9:26:29 AM	SiCl4 pre valve closed
4/21/2010	9:26:29 AM	SiCl4 post valve closed
4/21/2010	9:26:29 AM	Main Vac valve closed
4/21/2010	9:26:29 AM	Bypass valve closed
4/21/2010	9:26:29 AM	Bubbler valve closed
4/21/2010	9:26:29 AM	Helium MFC set to  0.000000
4/21/2010	9:26:29 AM	H2 MFC set to  0.000000
4/21/2010	9:26:29 AM	BCl3 MFC set to  0.000000
4/21/2010	9:26:29 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:26:29 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:26:29 AM	Tube furnace set to 0
4/21/2010	9:26:29 AM	Run finished at 9:26 AM
4/21/2010	9:26:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:27:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:27:44 AM	Recipe started at 9:27 AM
4/21/2010	9:27:44 AM	Helium valve closed
4/21/2010	9:27:44 AM	H2 valve closed
4/21/2010	9:27:44 AM	BCl3 valve closed
4/21/2010	9:27:44 AM	PH3 valve closed
4/21/2010	9:27:44 AM	SiCl4 pre valve closed
4/21/2010	9:27:44 AM	SiCl4 post valve closed
4/21/2010	9:27:44 AM	Main Vac valve closed
4/21/2010	9:27:44 AM	Bubbler valve closed
4/21/2010	9:27:44 AM	Bypass valve opened
4/21/2010	9:27:44 AM	Helium MFC set to  0.000000
4/21/2010	9:27:44 AM	H2 MFC set to  0.000000
4/21/2010	9:27:44 AM	BCl3 MFC set to  0.000000
4/21/2010	9:27:44 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:27:44 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:27:44 AM	Tube furnace set to 0
4/21/2010	9:28:14 AM	Helium valve closed
4/21/2010	9:28:14 AM	H2 valve closed
4/21/2010	9:28:14 AM	BCl3 valve closed
4/21/2010	9:28:14 AM	PH3 valve closed
4/21/2010	9:28:14 AM	SiCl4 pre valve closed
4/21/2010	9:28:14 AM	SiCl4 post valve closed
4/21/2010	9:28:14 AM	Bubbler valve closed
4/21/2010	9:28:14 AM	Main Vac valve opened
4/21/2010	9:28:14 AM	Bypass valve opened
4/21/2010	9:28:14 AM	Helium MFC set to  0.000000
4/21/2010	9:28:14 AM	H2 MFC set to  0.000000
4/21/2010	9:28:14 AM	BCl3 MFC set to  0.000000
4/21/2010	9:28:14 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:28:14 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:28:14 AM	Tube furnace set to 0
4/21/2010	9:28:14 AM	Run finished at 9:28 AM
4/21/2010	9:28:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:31:40 AM	Bypass valve closed
4/21/2010	9:31:41 AM	Main Vac valve closed
4/21/2010	9:31:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:31:59 AM	Recipe started at 9:31 AM
4/21/2010	9:31:59 AM	H2 valve closed
4/21/2010	9:31:59 AM	BCl3 valve closed
4/21/2010	9:31:59 AM	PH3 valve closed
4/21/2010	9:31:59 AM	SiCl4 pre valve closed
4/21/2010	9:31:59 AM	SiCl4 post valve closed
4/21/2010	9:31:59 AM	Main Vac valve closed
4/21/2010	9:31:59 AM	Bypass valve closed
4/21/2010	9:31:59 AM	Bubbler valve closed
4/21/2010	9:31:59 AM	Helium valve opened
4/21/2010	9:31:59 AM	Helium MFC set to  500.000000
4/21/2010	9:31:59 AM	H2 MFC set to  0.000000
4/21/2010	9:31:59 AM	BCl3 MFC set to  0.000000
4/21/2010	9:31:59 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:31:59 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:31:59 AM	Tube furnace set to 0
4/21/2010	9:33:19 AM	Helium valve closed
4/21/2010	9:33:19 AM	H2 valve closed
4/21/2010	9:33:19 AM	BCl3 valve closed
4/21/2010	9:33:19 AM	PH3 valve closed
4/21/2010	9:33:19 AM	SiCl4 pre valve closed
4/21/2010	9:33:19 AM	SiCl4 post valve closed
4/21/2010	9:33:19 AM	Main Vac valve closed
4/21/2010	9:33:19 AM	Bypass valve closed
4/21/2010	9:33:19 AM	Bubbler valve closed
4/21/2010	9:33:19 AM	Helium MFC set to  0.000000
4/21/2010	9:33:19 AM	H2 MFC set to  0.000000
4/21/2010	9:33:19 AM	BCl3 MFC set to  0.000000
4/21/2010	9:33:19 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:33:19 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:33:20 AM	Tube furnace set to 0
4/21/2010	9:33:20 AM	Run finished at 9:33 AM
4/21/2010	9:33:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	9:40:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:40:49 AM	Recipe started at 9:40 AM
4/21/2010	9:40:49 AM	Helium valve closed
4/21/2010	9:40:49 AM	H2 valve closed
4/21/2010	9:40:49 AM	BCl3 valve closed
4/21/2010	9:40:49 AM	PH3 valve closed
4/21/2010	9:40:49 AM	SiCl4 pre valve closed
4/21/2010	9:40:49 AM	SiCl4 post valve closed
4/21/2010	9:40:49 AM	Main Vac valve closed
4/21/2010	9:40:49 AM	Bubbler valve closed
4/21/2010	9:40:49 AM	Bypass valve opened
4/21/2010	9:40:49 AM	Helium MFC set to  0.000000
4/21/2010	9:40:49 AM	H2 MFC set to  0.000000
4/21/2010	9:40:49 AM	BCl3 MFC set to  0.000000
4/21/2010	9:40:49 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:40:49 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:40:49 AM	Tube furnace set to 0
4/21/2010	9:41:19 AM	Helium valve closed
4/21/2010	9:41:19 AM	H2 valve closed
4/21/2010	9:41:19 AM	BCl3 valve closed
4/21/2010	9:41:19 AM	PH3 valve closed
4/21/2010	9:41:19 AM	SiCl4 pre valve closed
4/21/2010	9:41:19 AM	SiCl4 post valve closed
4/21/2010	9:41:19 AM	Bubbler valve closed
4/21/2010	9:41:19 AM	Main Vac valve opened
4/21/2010	9:41:19 AM	Bypass valve opened
4/21/2010	9:41:19 AM	Helium MFC set to  0.000000
4/21/2010	9:41:19 AM	H2 MFC set to  0.000000
4/21/2010	9:41:19 AM	BCl3 MFC set to  0.000000
4/21/2010	9:41:19 AM	SiCl4 MFC set to  0.000000
4/21/2010	9:41:19 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	9:41:19 AM	Tube furnace set to 0
4/21/2010	9:41:19 AM	Run finished at 9:41 AM
4/21/2010	9:41:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	9:43:43 AM	Bypass valve closed
4/21/2010	9:43:44 AM	Main Vac valve closed
4/21/2010	9:43:53 AM	Main Vac valve opened
4/21/2010	9:43:54 AM	Bypass valve opened
4/21/2010	9:56:50 AM	Bypass valve closed
4/21/2010	9:56:50 AM	Main Vac valve closed
4/21/2010	9:57:04 AM	Main Vac valve opened
4/21/2010	9:57:17 AM	Main Vac valve closed
4/21/2010	10:00:09 AM	Main Vac valve opened
4/21/2010	10:00:10 AM	Bypass valve opened
4/21/2010	10:00:10 AM	Main Vac valve closed
4/21/2010	10:00:11 AM	Bypass valve closed
4/21/2010	10:00:11 AM	Main Vac valve opened
4/21/2010	10:00:12 AM	Bypass valve opened
4/21/2010	10:03:25 AM	Program exited cleanly
4/21/2010	10:05:40 AM	Program started normally
4/21/2010	10:05:41 AM	Helium valve closed
4/21/2010	10:05:41 AM	H2 valve closed
4/21/2010	10:05:41 AM	BCl3 valve closed
4/21/2010	10:05:41 AM	PH3 valve closed
4/21/2010	10:05:41 AM	SiCl4 pre valve closed
4/21/2010	10:05:41 AM	SiCl4 post valve closed
4/21/2010	10:05:41 AM	Main Vac valve closed
4/21/2010	10:05:41 AM	Bypass valve closed
4/21/2010	10:05:41 AM	Bubbler valve closed
4/21/2010	10:05:42 AM	Helium MFC set to  0.000000
4/21/2010	10:05:42 AM	H2 MFC set to  0.000000
4/21/2010	10:05:42 AM	BCl3 MFC set to  0.000000
4/21/2010	10:05:42 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:05:42 AM	Bypass solenoid MFC set to  760.000000
4/21/2010	10:05:43 AM	Tube furnace set to 0
4/21/2010	10:07:20 AM	Main Vac valve opened
4/21/2010	10:07:21 AM	Bypass valve opened
4/21/2010	10:12:20 AM	SiCl4 post valve opened
4/21/2010	10:12:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	10:12:54 AM	Recipe started at 10:12 AM
4/21/2010	10:12:54 AM	H2 valve closed
4/21/2010	10:12:54 AM	BCl3 valve closed
4/21/2010	10:12:54 AM	PH3 valve closed
4/21/2010	10:12:54 AM	SiCl4 pre valve closed
4/21/2010	10:12:54 AM	SiCl4 post valve closed
4/21/2010	10:12:54 AM	Main Vac valve closed
4/21/2010	10:12:54 AM	Bypass valve closed
4/21/2010	10:12:54 AM	Bubbler valve closed
4/21/2010	10:12:54 AM	Helium valve opened
4/21/2010	10:12:54 AM	Helium MFC set to  500.000000
4/21/2010	10:12:54 AM	H2 MFC set to  0.000000
4/21/2010	10:12:54 AM	BCl3 MFC set to  0.000000
4/21/2010	10:12:54 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:12:54 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:12:54 AM	Tube furnace set to 0
4/21/2010	10:14:15 AM	Helium valve closed
4/21/2010	10:14:15 AM	H2 valve closed
4/21/2010	10:14:15 AM	BCl3 valve closed
4/21/2010	10:14:15 AM	PH3 valve closed
4/21/2010	10:14:15 AM	SiCl4 pre valve closed
4/21/2010	10:14:15 AM	SiCl4 post valve closed
4/21/2010	10:14:15 AM	Main Vac valve closed
4/21/2010	10:14:15 AM	Bypass valve closed
4/21/2010	10:14:15 AM	Bubbler valve closed
4/21/2010	10:14:15 AM	Helium MFC set to  0.000000
4/21/2010	10:14:15 AM	H2 MFC set to  0.000000
4/21/2010	10:14:15 AM	BCl3 MFC set to  0.000000
4/21/2010	10:14:15 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:14:15 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:14:15 AM	Tube furnace set to 0
4/21/2010	10:14:15 AM	Run finished at 10:14 AM
4/21/2010	10:14:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	10:14:18 AM	SiCl4 post valve opened
4/21/2010	10:14:22 AM	SiCl4 post valve closed
4/21/2010	10:14:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	10:14:24 AM	Recipe started at 10:14 AM
4/21/2010	10:14:24 AM	Helium valve closed
4/21/2010	10:14:25 AM	H2 valve closed
4/21/2010	10:14:25 AM	BCl3 valve closed
4/21/2010	10:14:25 AM	PH3 valve closed
4/21/2010	10:14:25 AM	SiCl4 pre valve closed
4/21/2010	10:14:25 AM	SiCl4 post valve closed
4/21/2010	10:14:25 AM	Main Vac valve closed
4/21/2010	10:14:25 AM	Bubbler valve closed
4/21/2010	10:14:25 AM	Bypass valve opened
4/21/2010	10:14:25 AM	Helium MFC set to  0.000000
4/21/2010	10:14:25 AM	H2 MFC set to  0.000000
4/21/2010	10:14:25 AM	BCl3 MFC set to  0.000000
4/21/2010	10:14:25 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:14:25 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:14:25 AM	Tube furnace set to 0
4/21/2010	10:14:54 AM	Helium valve closed
4/21/2010	10:14:54 AM	H2 valve closed
4/21/2010	10:14:54 AM	BCl3 valve closed
4/21/2010	10:14:54 AM	PH3 valve closed
4/21/2010	10:14:54 AM	SiCl4 pre valve closed
4/21/2010	10:14:54 AM	SiCl4 post valve closed
4/21/2010	10:14:54 AM	Bubbler valve closed
4/21/2010	10:14:54 AM	Main Vac valve opened
4/21/2010	10:14:54 AM	Bypass valve opened
4/21/2010	10:14:54 AM	Helium MFC set to  0.000000
4/21/2010	10:14:54 AM	H2 MFC set to  0.000000
4/21/2010	10:14:54 AM	BCl3 MFC set to  0.000000
4/21/2010	10:14:54 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:14:54 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:14:54 AM	Tube furnace set to 0
4/21/2010	10:14:55 AM	Run finished at 10:14 AM
4/21/2010	10:14:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	10:15:47 AM	SiCl4 post valve opened
4/21/2010	10:16:32 AM	SiCl4 post valve closed
4/21/2010	10:16:49 AM	Bypass valve closed
4/21/2010	10:16:49 AM	Main Vac valve closed
4/21/2010	10:16:54 AM	Main Vac valve opened
4/21/2010	10:16:54 AM	Bypass valve opened
4/21/2010	10:17:09 AM	SiCl4 post valve opened
4/21/2010	10:17:10 AM	SiCl4 post valve closed
4/21/2010	10:17:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	10:17:13 AM	Recipe started at 10:17 AM
4/21/2010	10:17:13 AM	H2 valve closed
4/21/2010	10:17:13 AM	BCl3 valve closed
4/21/2010	10:17:13 AM	PH3 valve closed
4/21/2010	10:17:13 AM	SiCl4 pre valve closed
4/21/2010	10:17:13 AM	SiCl4 post valve closed
4/21/2010	10:17:13 AM	Main Vac valve closed
4/21/2010	10:17:13 AM	Bypass valve closed
4/21/2010	10:17:13 AM	Bubbler valve closed
4/21/2010	10:17:13 AM	Helium valve opened
4/21/2010	10:17:13 AM	Helium MFC set to  500.000000
4/21/2010	10:17:13 AM	H2 MFC set to  0.000000
4/21/2010	10:17:13 AM	BCl3 MFC set to  0.000000
4/21/2010	10:17:13 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:17:13 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:17:13 AM	Tube furnace set to 0
4/21/2010	10:18:34 AM	Helium valve closed
4/21/2010	10:18:34 AM	H2 valve closed
4/21/2010	10:18:34 AM	BCl3 valve closed
4/21/2010	10:18:34 AM	PH3 valve closed
4/21/2010	10:18:34 AM	SiCl4 pre valve closed
4/21/2010	10:18:34 AM	SiCl4 post valve closed
4/21/2010	10:18:34 AM	Main Vac valve closed
4/21/2010	10:18:34 AM	Bypass valve closed
4/21/2010	10:18:34 AM	Bubbler valve closed
4/21/2010	10:18:34 AM	Helium MFC set to  0.000000
4/21/2010	10:18:34 AM	H2 MFC set to  0.000000
4/21/2010	10:18:34 AM	BCl3 MFC set to  0.000000
4/21/2010	10:18:34 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:18:34 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:18:34 AM	Tube furnace set to 0
4/21/2010	10:18:34 AM	Run finished at 10:18 AM
4/21/2010	10:18:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	10:20:52 AM	SiCl4 post valve opened
4/21/2010	10:20:54 AM	SiCl4 post valve closed
4/21/2010	10:20:55 AM	SiCl4 post valve opened
4/21/2010	10:20:56 AM	SiCl4 post valve closed
4/21/2010	10:21:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	10:21:01 AM	Recipe started at 10:21 AM
4/21/2010	10:21:01 AM	Helium valve closed
4/21/2010	10:21:01 AM	H2 valve closed
4/21/2010	10:21:01 AM	BCl3 valve closed
4/21/2010	10:21:01 AM	PH3 valve closed
4/21/2010	10:21:01 AM	SiCl4 pre valve closed
4/21/2010	10:21:01 AM	SiCl4 post valve closed
4/21/2010	10:21:01 AM	Main Vac valve closed
4/21/2010	10:21:01 AM	Bubbler valve closed
4/21/2010	10:21:01 AM	Bypass valve opened
4/21/2010	10:21:01 AM	Helium MFC set to  0.000000
4/21/2010	10:21:01 AM	H2 MFC set to  0.000000
4/21/2010	10:21:01 AM	BCl3 MFC set to  0.000000
4/21/2010	10:21:01 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:21:01 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:21:01 AM	Tube furnace set to 0
4/21/2010	10:21:31 AM	Helium valve closed
4/21/2010	10:21:31 AM	H2 valve closed
4/21/2010	10:21:31 AM	BCl3 valve closed
4/21/2010	10:21:31 AM	PH3 valve closed
4/21/2010	10:21:31 AM	SiCl4 pre valve closed
4/21/2010	10:21:31 AM	SiCl4 post valve closed
4/21/2010	10:21:31 AM	Bubbler valve closed
4/21/2010	10:21:31 AM	Main Vac valve opened
4/21/2010	10:21:31 AM	Bypass valve opened
4/21/2010	10:21:31 AM	Helium MFC set to  0.000000
4/21/2010	10:21:31 AM	H2 MFC set to  0.000000
4/21/2010	10:21:31 AM	BCl3 MFC set to  0.000000
4/21/2010	10:21:31 AM	SiCl4 MFC set to  0.000000
4/21/2010	10:21:31 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	10:21:31 AM	Tube furnace set to 0
4/21/2010	10:21:31 AM	Run finished at 10:21 AM
4/21/2010	10:21:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/21/2010	11:00:52 AM	Bypass valve closed
4/21/2010	11:00:52 AM	Main Vac valve closed
4/21/2010	11:03:10 AM	Main Vac valve opened
4/21/2010	11:03:11 AM	Bypass valve opened
4/21/2010	11:23:47 AM	Bypass valve closed
4/21/2010	11:23:48 AM	Main Vac valve closed
4/21/2010	11:23:54 AM	Bypass valve opened
4/21/2010	11:23:54 AM	Main Vac valve opened
4/21/2010	11:33:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	11:33:41 AM	Recipe started at 11:33 AM
4/21/2010	11:33:41 AM	H2 valve closed
4/21/2010	11:33:41 AM	BCl3 valve closed
4/21/2010	11:33:41 AM	PH3 valve closed
4/21/2010	11:33:41 AM	SiCl4 pre valve closed
4/21/2010	11:33:41 AM	SiCl4 post valve closed
4/21/2010	11:33:41 AM	Main Vac valve closed
4/21/2010	11:33:41 AM	Bypass valve closed
4/21/2010	11:33:41 AM	Bubbler valve closed
4/21/2010	11:33:41 AM	Helium valve opened
4/21/2010	11:33:41 AM	Helium MFC set to  500.000000
4/21/2010	11:33:41 AM	H2 MFC set to  0.000000
4/21/2010	11:33:41 AM	BCl3 MFC set to  0.000000
4/21/2010	11:33:41 AM	SiCl4 MFC set to  0.000000
4/21/2010	11:33:41 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	11:33:41 AM	Tube furnace set to 0
4/21/2010	11:35:02 AM	Helium valve closed
4/21/2010	11:35:02 AM	H2 valve closed
4/21/2010	11:35:02 AM	BCl3 valve closed
4/21/2010	11:35:02 AM	PH3 valve closed
4/21/2010	11:35:02 AM	SiCl4 pre valve closed
4/21/2010	11:35:02 AM	SiCl4 post valve closed
4/21/2010	11:35:02 AM	Main Vac valve closed
4/21/2010	11:35:02 AM	Bypass valve closed
4/21/2010	11:35:02 AM	Bubbler valve closed
4/21/2010	11:35:02 AM	Helium MFC set to  0.000000
4/21/2010	11:35:02 AM	H2 MFC set to  0.000000
4/21/2010	11:35:02 AM	BCl3 MFC set to  0.000000
4/21/2010	11:35:02 AM	SiCl4 MFC set to  0.000000
4/21/2010	11:35:02 AM	Bypass solenoid MFC set to  0.000000
4/21/2010	11:35:02 AM	Tube furnace set to 0
4/21/2010	11:35:02 AM	Run finished at 11:35 AM
4/21/2010	11:35:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/21/2010	11:35:26 AM	Tube furnace set to 1000
4/21/2010	11:35:35 AM	Helium MFC set to  500.000000
4/21/2010	11:35:55 AM	Helium valve opened
4/21/2010	11:36:01 AM	Bubbler valve opened
4/21/2010	11:37:44 AM	Bubbler valve closed
4/21/2010	11:37:45 AM	Helium valve closed
4/21/2010	11:37:51 AM	SiCl4 post valve opened
4/21/2010	11:37:51 AM	SiCl4 post valve closed
4/21/2010	11:37:54 AM	SiCl4 post valve opened
4/21/2010	11:37:56 AM	SiCl4 post valve closed
4/21/2010	11:37:57 AM	SiCl4 post valve opened
4/21/2010	11:37:58 AM	SiCl4 post valve closed
4/21/2010	11:38:00 AM	Helium valve opened
4/21/2010	11:38:05 AM	Bubbler valve opened
4/21/2010	11:38:33 AM	SiCl4 MFC set to  325.000000
4/21/2010	11:38:51 AM	Bubbler valve closed
4/21/2010	11:38:52 AM	Helium valve closed
4/21/2010	11:39:12 AM	SiCl4 pre valve opened
4/21/2010	11:39:13 AM	SiCl4 post valve opened
4/21/2010	11:39:30 AM	SiCl4 post valve closed
4/21/2010	11:39:31 AM	SiCl4 pre valve closed
4/21/2010	11:39:32 AM	Helium valve opened
4/21/2010	11:39:35 AM	Bubbler valve opened
4/21/2010	11:53:16 AM	H2 MFC set to  500.000000
4/21/2010	11:53:40 AM	H2 valve opened
4/21/2010	11:53:41 AM	Helium valve closed
4/21/2010	11:55:07 AM	Bubbler valve closed
4/21/2010	11:55:08 AM	SiCl4 pre valve opened
4/21/2010	11:55:08 AM	SiCl4 post valve opened
4/21/2010	11:55:10 AM	Bubbler valve opened
4/21/2010	11:56:49 AM	SiCl4 post valve closed
4/21/2010	11:56:49 AM	SiCl4 pre valve closed
4/21/2010	11:57:15 AM	Helium valve opened
4/21/2010	11:57:16 AM	H2 valve closed
4/21/2010	11:57:22 AM	Tube furnace set to 0
4/21/2010	12:01:00 PM	Bubbler valve closed
4/21/2010	12:01:01 PM	Helium valve closed
4/21/2010	12:01:24 PM	Bypass valve opened
4/21/2010	12:01:47 PM	Main Vac valve opened
4/21/2010	3:48:25 PM	SiCl4 MFC set to  0.000000
4/21/2010	3:48:27 PM	H2 MFC set to  0.000000
4/21/2010	3:48:29 PM	Helium MFC set to  0.000000
